LAB Motion Systems - ZS100B-LM - ZS Series - Optoelektronic

Stroke: 100 mm, Load capacity: 20 kg, Dimensions moving platform: 300x190 mm, Total mass: 12 kg, Speed: 500 mm/s, Acceleration: 10 m/s², Accuracy: ±0,5 µm, Encoder resolution: 1,5,...1000 nm, Repeatability: ±75 nm, Flatness: ±1 µm, Straightness: ±1 micron, X deflection: ±70 micro radians, Y deflection: ±100 micro radians, Z deflection: ±70 micro radians