LAB Motion Systems - LS500 - LS Series - Optoelektronic

Stroke: 500 mm, Load capacity: 35 kg, Dimensions moving platform: 238x248 mm, Total mass: 60 kg, Speed: 1 m/s, Acceleration: 10 m/s², Accuracy: ± 0,4 µm, Encoder resolution: 1,5,...1000 nm, Repeatability: 0,1 µm, Flatness: ± 1 µm, Straightness: ± 1.5 µm, X-bias: ± 6 µm, Y-bias: ± 8 µm, Z-bias: ± 8 µm 1.5 micron, X deflection: ±15 micro radian, Y deflection: ±20 micro radian, Z deflection: ±15 micro radian