LAB Motion Systems - PL300 - PL Series - Optoelektronic

Form factor moving platform: 250x250 mm, speed: 1 m/s, acceleration: 10 m/s², encoder resolution: 1 nm, repeatability: 0,1 µm, accuracy X: ±0,4 µm, accuracy Y: ±0,4 µm, flatness: ±0,5 µm, XY combined flatness over an area of 300x300 mm: ±1 µm, straightness X,Y: ±0,5 µm, XY orthogonality: 10 µrad, X deflection: ±5 µrad, Y deflection: ±5 µrad, Z deflection: ±5 µrad