LAB Motion Systems - ZS50B-LM - ZS Series - Optoelektronic

Stroke: 50 mm, Load capacity: 20 kg, Dimensions moving platform: 240x190 mm, Total mass: 10 kg, Speed: 300 mm/s, Acceleration: 10 m/s², Accuracy: ±0,5 µm, Encoder resolution: 1,5,...1000 nm, Repeatability: ±75 nm, Flatness: ±0,75 µm. Straightness: ±0.75 µm, X deflection: ±50 micro radians, Y deflection: ±75 micro radians, Z deflection: ±50 micro radians