LAB Motion Systems - PL100 - PL Series - Optoelektronic

Overall dimensions moving platform: 250x250 mm, speed: 1 m/s, acceleration: 10 m/s², encoder resolution: 1 nm, repeatability: 0,1 µm, accuracy X: ±0,3 µm, accuracy Y: ±0,3 µm, flatness: ±0,3 µm, XY combined flatness over an area of 300x300 mm: ±1 µm, straightness X,Y: ±0,3 Micron, XY orthogonality: 10 microradians, X deflection: ±3 microradians, Y deflection: ±3 microradians, Z deflection: ±3 microradians